Gate dielectric integrity : material, process, and tool qualification /
Gate dielectric integrity : material, process, and tool qualification /
Ed. : Dinesh C. Gupta, George A. Brown
- West Conshocken, PA. : ASTM, 2000
- xi, 169 p. : ill. ; 23 cm.
Conference on Gate Dielectric Integrity, held Jan. 25, 1999, San Jose, Calif.
Includes bibliographical references.
0803126158
99-086920
Dielectrics--Testing.
Gate array circuits--Materials.
Integrated circuits--Wafer-scale integration--Reliability.
Semiconductor wafers--Reliability.
Silicon oxide films--Testing.
Mechatronics Engineering Technology
Chất bán dẫn
Vật liệu bán dẫn
Điện tử
TK7871.85. / G32 2000
621.381 / GAT 2000
Conference on Gate Dielectric Integrity, held Jan. 25, 1999, San Jose, Calif.
Includes bibliographical references.
0803126158
99-086920
Dielectrics--Testing.
Gate array circuits--Materials.
Integrated circuits--Wafer-scale integration--Reliability.
Semiconductor wafers--Reliability.
Silicon oxide films--Testing.
Mechatronics Engineering Technology
Chất bán dẫn
Vật liệu bán dẫn
Điện tử
TK7871.85. / G32 2000
621.381 / GAT 2000
