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Enabling technology for MEMS and nanodevices. Volume 1

Enabling technology for MEMS and nanodevices. Volume 1 - Weinheim : Wiley-VCH, 2004 - 427 p.

ISBN: 352730746X

Subjects--Topical Terms:
Microelectromechanical systems.
Microelectronics.
Nanotechnology.

Subjects--Index Terms: Công nghệ Nano MEMS Siêu điện tử

Dewey Class. No.: 620.5 / ENA(1) 2004

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Enabling technology for MEMS and nanodevices. Volume 1

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