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Materials science of thin films : deposition and structure /

Ohring, Milton, 1936-

Materials science of thin films : deposition and structure / Milton Ohring. - 2nd ed. - San Diego, CA : Academic Press, 2002. - xxi, 794 p. : ill. ; 24 cm.

Includes bibliographical references and index.

ISBN: 0125249756 (alk. paper)

LCCN: 2001-089414

Subjects--Topical Terms:
Thin films.
Mechatronics Engineering Technology
Semiconductors
Phim mỏng
Mạch điện

LC Class. No.: TA418.9.T45 / O47 2002

Dewey Class. No.: 621.3815/2 / OHR 2002

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