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Thin film materials : stress, defect formation, and surface evolution /

Freund, L. B.

Thin film materials : stress, defect formation, and surface evolution / L.B. Freund, S. Suresh. - 1st pbk. ed. - Cambridge, [England] ; New York : Cambridge University Press, 2009. - xviii, 750 p. : ill. ; 25 cm.

Includes bibliographical references (p. 713-737) and indexes.

ISBN: 9780521529778

LCCN: 2009-289764

Subjects--Topical Terms:
Thin films.
Electronics.
Mechatronics Engineering Technology
Kỹ thuật điện
Phim mỏng
Điện tử

LC Class. No.: TA418.9.T45 / F74 2009

Dewey Class. No.: 621.38152 / FRE 2009

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Thin film materials : stress, defect formation, and surface evolution /

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