Fundamentals of semiconductor manufacturing and process control /

May, Gary S

Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. - Hoboken, N.J. : Chichester : IEEE Wiley-Interscience, John Wiley [distributor], 2006. - xix, 463 p. : ill. ; 25 cm.

Formerly CIP. |5 Uk

Includes bibliographical references and index.

0471784060

2005-028448

GBA627486 |2 bnb


Integrated circuits--Design and construction.
Process control--Statistical methods.
Semiconductors--Design and construction.
Mechatronics Engineering Technology
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TK7871.85 / M379 2006

621.3815/2 / MAY 2006