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Emerging semiconductor technology : a symposium / sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors.

Contributor(s): Material type: TextTextLanguage: English Series: ASTM special technical publication ; 960Publication details: Philadelphia, PA : American Society for Testing and Materials, c1987Description: 704 p. : ill. ; 24 cmISBN:
  • 0803104596
Subject(s): DDC classification:
  • 621.38 EME 1987 14
LOC classification:
  • TK7871.85 .E47 1987
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Sách, chuyên khảo, tuyển tập Phòng DVTT KHTN & XHNV Kho Tự nhiên tham khảo 621.38 EME 1987 (Browse shelf(Opens below)) 1 Available AV-D1/01624
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"ASTM publication code number (PCN) 04-960000-46."

Papers presented at the Fourth International Symposium on Semiconductor Processing.

Includes bibliographies and indexes.

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