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Chemical physics of thin film deposition processes for micro- and nano-technologies / edited by Yves Pauleau.

Contributor(s): Material type: TextTextLanguage: English Series: NATO science series. Series II, Mathematics, physics, and chemistry ; ; v. 55Publication details: Dordrecht ; Boston : Kluwer Academic Publishers, c2002.Description: xiii, 363 p. : ill. ; 25 cmISBN:
  • 1402005245 (alk. paper)
Subject(s): DDC classification:
  • 621.3815/2 CHE 2002 21
LOC classification:
  • TA418.9.T45 C47 2002
Online resources:
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Sách, chuyên khảo, tuyển tập Phòng DVTT KHTN & XHNV Kho Tự nhiên tham khảo 621.3815/2 CHE 2002 (Browse shelf(Opens below)) 1 Available 01111000079
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"Published in cooperation with NATO Scientific Affairs Division."

Includes bibliographical references and index.

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