Gate dielectric integrity :  material, process, and tool qualification / 
Ed. : Dinesh C. Gupta, George A. Brown 
 - West Conshocken, PA. :  ASTM,  2000 
 - xi, 169 p. :  ill. ;  23 cm. 
<br/><br/> Conference on Gate Dielectric Integrity, held Jan. 25, 1999, San Jose, Calif. 
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>0803126158 
<br/><br/><label>LCCN: </label>99-086920 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Dielectrics--Testing.<br/>Gate array circuits--Materials.<br/>Integrated circuits--Wafer-scale integration--Reliability.<br/>Semiconductor wafers--Reliability.<br/>Silicon oxide films--Testing.<br/>Mechatronics Engineering Technology<br/>Chất bán dẫn<br/>Vật liệu bán dẫn<br/>Điện tử
<br/><br/><label>LC Class. No.: </label>TK7871.85.  / G32 2000 
<br/><br/><label>Dewey Class. No.: </label>621.381  / GAT 2000