TY  - BOOK
AU  - Brown,George A.
AU  - Gupta,D.C.
ED  - Conference on Gate Dielectric Integrity
TI  - Gate dielectric integrity: material, process, and tool qualification 
SN  - 0803126158
AV  - TK7871.85. G32 2000
U1  - 621.381 21
PY  - 2000///
CY  - West Conshocken, PA.
PB  - ASTM
KW  - Dielectrics
KW  - Testing
KW  - Gate array circuits
KW  - Materials
KW  - Integrated circuits
KW  - Wafer-scale integration
KW  - Reliability
KW  - Semiconductor wafers
KW  - Silicon oxide films
KW  - Mechatronics Engineering Technology
KW  - Chất bán dẫn
KW  - Vật liệu bán dẫn
KW  - Điện tử
N1  - Conference on Gate Dielectric Integrity, held Jan. 25, 1999, San Jose, Calif; Includes bibliographical references
ER  -