TY  - BOOK
AU  - Gupta,D.C.
AU  - Langer,Paul H.
ED  - ASTM Committee F-1 on Electronics.
ED  - Symposium on Semiconductor Processing
TI  - Emerging semiconductor technology: a symposium 
SN  - 0803104596
AV  - TK7871.85 .E47 1987
U1  - 621.38 14
PY  - 1987///
CY  - Philadelphia, PA
PB  - American Society for Testing and Materials
KW  - Semiconductor industry
KW  - Congresses
KW  - Semiconductors
KW  - Design and construction
KW  - Chất bán dẫn
KW  - Công nghiệp bán dẫn
N1  - "ASTM publication code number (PCN) 04-960000-46."; Papers presented at the Fourth International Symposium on Semiconductor Processing; Includes bibliographies and indexes
ER  -