TY - BOOK AU - Gupta,D.C. AU - Langer,Paul H. ED - ASTM Committee F-1 on Electronics. ED - Symposium on Semiconductor Processing TI - Emerging semiconductor technology: a symposium SN - 0803104596 AV - TK7871.85 .E47 1987 U1 - 621.38 14 PY - 1987/// CY - Philadelphia, PA PB - American Society for Testing and Materials KW - Semiconductor industry KW - Congresses KW - Semiconductors KW - Design and construction KW - Chất bán dẫn KW - Công nghiệp bán dẫn N1 - "ASTM publication code number (PCN) 04-960000-46."; Papers presented at the Fourth International Symposium on Semiconductor Processing; Includes bibliographies and indexes ER -