The Phyics of NSI :  Xerox, Palo Alto, 1984 

 - New York :  American Institute of Physics,  1984 
 - 294 tr. 
<br/><br/><label>Subjects--Index Terms: </label>Lithography Oxides Physics Surfaces Vật lý học 
<br/><br/><label>Dewey Class. No.: </label>530  / PHY 1984