Thin film materials : stress, defect formation, and surface evolution /
L.B. Freund, S. Suresh.
- 1st pbk. ed.
- Cambridge, [England] ; New York : Cambridge University Press, 2009.
- xviii, 750 p. : ill. ; 25 cm.
Includes bibliographical references (p. 713-737) and indexes.
9780521529778
2009-289764
Thin films. Electronics. Mechatronics Engineering Technology Kỹ thuật điện Phim mỏng Điện tử