TY  - BOOK
AU  - Freund,L.B.
AU  - Suresh,S.
TI  - Thin film materials: stress, defect formation, and surface evolution 
SN  - 9780521529778
AV  - TA418.9.T45 F74 2009
U1  - 621.38152 14
PY  - 2009///
CY  - Cambridge, [England] ; New York
PB  - Cambridge University Press
KW  - Thin films
KW  - Electronics
KW  - Mechatronics Engineering Technology
KW  - Kỹ thuật điện
KW  - Phim mỏng
KW  - Điện tử
N1  - Includes bibliographical references (p. 713-737) and indexes
UR  - http://www.loc.gov/catdir/enhancements/fy1001/2009289764-b.html
UR  - http://www.loc.gov/catdir/enhancements/fy1001/2009289764-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy1001/2009289764-t.html
ER  -