Chemical physics of thin film deposition processes for micro- and nano-technologies / 
edited by Yves Pauleau. 
 - Dordrecht ;  Boston :  Kluwer Academic Publishers,  c2002. 
 - xiii, 363 p. :  ill. ;  25 cm. 
 - NATO science series.  Series II,  Mathematics, physics, and chemistry ;  v. 55 .
<br/><br/> "Published in cooperation with NATO Scientific Affairs Division." 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>1402005245 (alk. paper) 
<br/><br/><label>LCCN: </label>2002-072962 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin films--Congresses.<br/>Nanotechnology--Congresses.
<br/><br/><label>Subjects--Index Terms: </label>Công nghệ nanô Vật lý hóa học Màng mỏng 
<br/><br/><label>LC Class. No.: </label>TA418.9.T45  / C47 2002 
<br/><br/><label>Dewey Class. No.: </label>621.3815/2  / CHE 2002