Semiconductors for micro- and nanotechnology : an introduction for engineers /
Jan G. Korvink and Andreas Greiner.
- Weinheim : Wiley-VCH, c2002.
- 340 p. : ill. ; 24 cm.
TNS04401
Includes bibliographical references and index.
3527302573
2002-512459
GBA1-Z8391
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