TY  - BOOK
AU  - Robinson,Alex
AU  - Lawson,Richard
TI  - Materials and processes for next generation lithography
SN  - 9780081003541
U1  - 621.38153 23
PY  - 2016///
CY  - Amsterdam
PB  - Elsevier
KW  - Nanolithography
KW  - Photoresists
KW  - Microlithography
KW  - Kỹ thuật in
KW  - Vật liệu in
N1  - Volume 11 / 00041002746
ER  -