Madou, Marc J.

Fundamentals of microfabrication / Marc Madou. - Boca Raton, Fla. : CRC Press, c1997. - 589 p., [22] p. of plates : ill. (some col.) ; 29 cm.

Includes bibliographical references (p. 565-569) and index.

0849394511 (acid-free paper)

96-043344


Microelectronics.
Integrated circuits--Design and construction.
Microelectromechanical systems--Design and construction.
Machining.
Microelectronic packaging.
Lasers--Industrial applications.
Semiconductors 
Mechatronics Engineering Technology

Mạch điện Vi điện tử Ứng dụng công nghiệp

TK7836 / .M33 1997

621.3815/2 / MAD 1997