Madou, Marc J.
Fundamentals of microfabrication /
Marc Madou.
- Boca Raton, Fla. : CRC Press, c1997.
- 589 p., [22] p. of plates : ill. (some col.) ; 29 cm.
Includes bibliographical references (p. 565-569) and index.
0849394511 (acid-free paper)
96-043344
Microelectronics.
Integrated circuits--Design and construction.
Microelectromechanical systems--Design and construction.
Machining.
Microelectronic packaging.
Lasers--Industrial applications.
Semiconductors
Mechatronics Engineering Technology
Mạch điện Vi điện tử Ứng dụng công nghiệp
TK7836 / .M33 1997
621.3815/2 / MAD 1997