TY  - BOOK
AU  - Madou,Marc J.
TI  - Fundamentals of microfabrication
SN  - 0849394511 (acid-free paper)
AV  - TK7836 .M33 1997
U1  - 621.3815/2 20
PY  - 1997///
CY  - Boca Raton, Fla.
PB  - CRC Press
KW  - Microelectronics
KW  - Integrated circuits
KW  - Design and construction
KW  - Microelectromechanical systems
KW  - Machining
KW  - Microelectronic packaging
KW  - Lasers
KW  - Industrial applications
KW  - Semiconductors 
KW  - Mechatronics Engineering Technology
KW  - Mạch điện
KW  - Vi điện tử
KW  - Ứng dụng công nghiệp
N1  - Includes bibliographical references (p. 565-569) and index
ER  -