TY - BOOK AU - Madou,Marc J. TI - Fundamentals of microfabrication SN - 0849394511 (acid-free paper) AV - TK7836 .M33 1997 U1 - 621.3815/2 20 PY - 1997/// CY - Boca Raton, Fla. PB - CRC Press KW - Microelectronics KW - Integrated circuits KW - Design and construction KW - Microelectromechanical systems KW - Machining KW - Microelectronic packaging KW - Lasers KW - Industrial applications KW - Semiconductors  KW - Mechatronics Engineering Technology KW - Mạch điện KW - Vi điện tử KW - Ứng dụng công nghiệp N1 - Includes bibliographical references (p. 565-569) and index ER -