May, Gary S <br/><br/>
Fundamentals of semiconductor manufacturing and process control / 
Gary S. May, Costas J. Spanos. 
 - Hoboken, N.J. :  Chichester :  IEEE Wiley-Interscience,  John Wiley [distributor],  2006. 
 - xix, 463 p. :  ill. ;  25 cm. 
<br/><br/> Formerly CIP. |5 Uk 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0471784060 
<br/><br/><label>LCCN: </label>2005-028448 
<br/><br/><label>Nat. Bib. No.: </label>GBA627486 |2 bnb 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction.<br/>Process control--Statistical methods.<br/>Semiconductors--Design and construction.<br/>Mechatronics Engineering Technology<br/>Chất bán dẫn<br/>Mạch tích hợp<br/>Phương pháp thống kê<br/>Điều khiển học<br/>Điện tử
<br/><br/><label>LC Class. No.: </label>TK7871.85  / M379 2006 
<br/><br/><label>Dewey Class. No.: </label>621.3815/2  / MAY 2006