TY  - BOOK
AU  - Franssila,Sami
TI  - Introduction to microfabrication
SN  - 9780470749838
AV  - TK7875 .F73 2010
U1  - 621.381 22
PY  - 2010///
CY  - Chichester, West Sussex [England]
PB  - John Wiley & Sons
KW  - Microelectromechanical systems
KW  - Electronic apparatus and appliances
KW  - Microfabrication
KW  - Thiết bị điện tử
KW  - Hệ thống cơ vi điện tử
KW  - Vi điện tử
KW  - Mechatronics Engineering Technology
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy1201/2010010076-b.html
UR  - http://www.loc.gov/catdir/enhancements/fy1201/2010010076-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy1201/2010010076-t.html
ER  -