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Materials and processes for next generation lithography / edited by Alex Robinson, Richard Lawson. by
Material type: Text Text; Format: print ; Literary form: Not fiction
Language: English
Publication details: Amsterdam : Elsevier , 2016
Availability: Items available for loan: Phòng DVTT Tổng hợp (1)Call number: 621.38153 MAT 2016.

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Fundamental principles of optical lithography : the science of microfabrication / Chris Mack. by
Material type: Text Text; Format: print ; Literary form: Not fiction
Language: English
Publication details: Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007
Online resources:
Availability: Items available for loan: Phòng DVTT KHTN & XHNV (1)Call number: 621.3815/31 MAC 2007. Phòng DVTT Việt Nhật (1)Call number: 621.3815/31 MAC 2007.

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