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		Gate dielectric integrity : material, process, and tool qualification / Ed. : Dinesh C. Gupta, George A. Brown by Brown, George A, 1937- Gupta, D. C. (Dinesh C.) Conference on Gate Dielectric Integrity (1999 : San Jose, Calif.) Material type: Text; Format: print ; Literary form: Fiction ; Audience: Preschool; Language: English Publication details: West Conshocken, PA. : ASTM, 2000 Availability: Items available for loan: Phòng DVTT KHTN & XHNV (4)Call number: 621.381 GAT 2000, ... Place hold Log in to add tags Add to cart (remove)
		Semiconductor fabrication : technology and metrology / Ed. : Dinesh C. Gupta by Gupta, D. C. (Dinesh C.) [Editor] ASTM Committee F-1 on Electronics Semiconductor Equipment and Materials Institute Symposium on Semiconductor Processing (5th : 1988 : Santa Clara, Calif.) Series: ASTM special technical publication ; 990. Material type: Text; Format: print ; Literary form: Fiction ; Audience: Preschool; Language: English Publication details: Philadelphia, PA : ASTM, c1989 Availability: Items available for loan: Phòng DVTT KHTN & XHNV (1)Call number: 621.3815 SEM 1989. Place hold Log in to add tags Add to cart (remove)

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