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Chemical physics of thin film deposition processes for micro- and nano-technologies / edited by Yves Pauleau.
Material type:
TextLanguage: English Series: NATO science series. Series II, Mathematics, physics, and chemistry ; ; v. 55Publication details: Dordrecht ; Boston : Kluwer Academic Publishers, c2002.Description: xiii, 363 p. : ill. ; 25 cmISBN: - 1402005245 (alk. paper)
- 621.3815/2 CHE 2002 21
- TA418.9.T45 C47 2002
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
| Sách, chuyên khảo, tuyển tập | Phòng DVTT KHTN & XHNV Kho Tự nhiên tham khảo | 621.3815/2 CHE 2002 (Browse shelf(Opens below)) | 1 | Available | 01111000079 |
"Published in cooperation with NATO Scientific Affairs Division."
Includes bibliographical references and index.
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