000			01690nam a2200469 4500
001			vtls000055421
003			VRT
005			20240802173354.0
008			1012071105s1987 paua b 101 0 eng
010			_a86-028761
020			_a0803104596
035			_aVNU050064584
039		9	_a201608161747 _bhaianh _c201502080243 _dVLOAD _y201012070215 _zVLOAD
041			_aeng
044			_aUS
050	0	0	_aTK7871.85 _b.E47 1987
082	0	0	_a621.38 _bEME 1987 _214
090			_a621.38 _bEME 1987
094			_a32.859
245	0	0	_aEmerging semiconductor technology : _ba symposium / _csponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors.
260			_aPhiladelphia, PA : _bAmerican Society for Testing and Materials, _cc1987
300			_a704 p. : _bill. ; _c24 cm.
440		0	_aASTM special technical publication ; _v960
500			_a"ASTM publication code number (PCN) 04-960000-46."
500			_aPapers presented at the Fourth International Symposium on Semiconductor Processing.
504			_aIncludes bibliographies and indexes.
650		0	_aSemiconductor industry _xCongresses.
650		0	_aSemiconductors _xDesign and construction _xCongresses.
653			_aChất bán dẫn
653			_aCông nghiệp bán dẫn
700	1		_aGupta, D. C. _q(Dinesh C.)
700	1		_aLanger, Paul H.
710	2		_aASTM Committee F-1 on Electronics.
711	2		_aSymposium on Semiconductor Processing _n(4th : _d1986 : _cSan Jose, Calif.)
900			_aTrue
911			_aTrương Kim Thanh
912			_aĐồng Đức Hùng
925			_aG
926			_a0
927			_aSH
942			_1
999			_c310981 _d310981