000			01761cam a22004574a 4500
001			vtls000111970
003			VRT
005			20240802184552.0
008			110818s2002 caua b 001 0 eng
010			_a2001-089414
020			_a0125249756 (alk. paper)
035			_a12362221
039		9	_a201808071158 _bhaianh _c201502081239 _dVLOAD _c201109271447 _dyenh _c201109201413 _dyenh _y201108181515 _zthupt
040			_aDLC _cDLC _dDLC
041	1		_aeng
042			_apcc
044			_aUS
050	0	0	_aTA418.9.T45 _bO47 2002
082	0	0	_a621.3815/2 _bOHR 2002 _222
090			_a621.3815 _bOHR 2002
100	1		_aOhring, Milton, _d1936-
245	1	0	_aMaterials science of thin films : _bdeposition and structure / _cMilton Ohring.
250			_a2nd ed.
260			_aSan Diego, CA : _bAcademic Press, _c2002.
300			_axxi, 794 p. : _bill. ; _c24 cm.
504			_aIncludes bibliographical references and index.
650		0	_aThin films.
650		0	_aMechatronics Engineering Technology
650		0	_aSemiconductors
650		0	_aPhim mỏng
650		0	_aMạch điện
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/description/els031/2001089414.html
856	4	1	_3Table of contents _uhttp://www.loc.gov/catdir/toc/els031/2001089414.html
856	4	2	_3Book review (E-STREAMS) _uhttp://www.e-streams.com/es0505/es0505_1873.htm
906			_a7 _bcbc _corignew _d2 _eepcn _f20 _gy-gencatlg
911			_aHoàng Yến
912			_aHoàng Thị Hòa
925	0		_aacquire _b2 shelf copies _xpolicy default
942			_c1
955			_apc21 03-28-01; _apv04 2001-12-05 to ASCD _ajf00 2001-12-07; _cjf03 2003-06-09 to Subj.; _djf04 2003-06-19 to S.L. _ejf12 2003-06-23 to Dewey _ajf16 2003-07-02 copy2 to BCCD _aaa07 2003-07-24
999			_c346898 _d346898