000			01773cam a2200505 a 4500
001			vtls000121681
003			VRT
005			20240802185049.0
008			130507s1997 fluaf b 001 0 eng
010			_a96-043344
020			_a0849394511 (acid-free paper)
035			_a1636710
039		9	_a201808071700 _bhaianh _c201502081430 _dVLOAD _c201305141611 _dbactt _c201305130935 _dngocanh _y201305071029 _znguyenlam2501
040			_aDLC _cDLC _dDLC
041			_aeng
044			_aUS
050	0	0	_aTK7836 _b.M33 1997
082	0	0	_a621.3815/2 _bMAD 1997 _220
090			_a621.3815 _bMAD 1997
100	1		_aMadou, Marc J.
245	1	0	_aFundamentals of microfabrication / _cMarc Madou.
260			_aBoca Raton, Fla. : _bCRC Press, _cc1997.
300			_a589 p., [22] p. of plates : _bill. (some col.) ; _c29 cm.
504			_aIncludes bibliographical references (p. 565-569) and index.
650		0	_aMicroelectronics.
650		0	_aIntegrated circuits _xDesign and construction.
650		0	_aMicroelectromechanical systems _xDesign and construction.
650		0	_aMachining.
650		0	_aMicroelectronic packaging.
650		0	_aLasers _xIndustrial applications.
650		0	_aSemiconductors
650		0	_aMechatronics Engineering Technology
653			_aMạch điện
653			_aVi điện tử
653			_aỨng dụng công nghiệp
906			_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg
911			_aNgọc Anh
912			_aTrịnh Thị Bắc
920			_a** LC HAS REQ'D # OF SHELF COPIES **
926			_a0
927			_aSH
942			_c1
955			_apc16 to ja00 08-30-96;jf05 to subj. 08/30/96; jf08 09-03-96 to SL; jf00 09-03-96; CIP ver. pv07 11-04-97
991			_bc-GenColl _hTK7836 _i.M33 1997 _tCopy 1 _wBOOKS
999			_c357830 _d357830