Materials and processes for next generation lithography / (Record no. 352046)

MARC details
000 -LEADER
fixed length control field 00970nam a2200361 a 4500
001 - CONTROL NUMBER
control field vtls000153439
003 - CONTROL NUMBER IDENTIFIER
control field VRT
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20240802184744.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 220414s2016 ne a 001 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780081003541
039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE]
Level of rules in bibliographic description 202204291022
Level of effort used to assign nonsubject heading access points yenh
Level of effort used to assign subject headings 202204291021
Level of effort used to assign classification yenh
-- 202204140906
-- ngothuha
040 ## - CATALOGING SOURCE
Original cataloging agency VNU
041 1# - LANGUAGE CODE
Language code of text/sound track or separate title eng
044 ## - COUNTRY OF PUBLISHING/PRODUCING ENTITY CODE
MARC country code US
082 1# - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38153
Item number MAT 2016
Edition information 23
090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN)
Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) 621.38153
Local cutter number (OCLC) ; Book number/undivided call number, CALL (RLIN) MAT 2016
245 00 - TITLE STATEMENT
Title Materials and processes for next generation lithography /
Statement of responsibility, etc. edited by Alex Robinson, Richard Lawson.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Amsterdam :
Name of publisher, distributor, etc. Elsevier ,
Date of publication, distribution, etc. 2016
300 ## - PHYSICAL DESCRIPTION
Extent 608 p.
505 ## - FORMATTED CONTENTS NOTE
Formatted contents note Volume 11 / 00041002746
650 00 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Nanolithography.
650 00 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Photoresists.
650 00 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microlithography.
650 00 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Kỹ thuật in
650 00 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Vật liệu in
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Robinson, Alex.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Lawson, Richard.
900 ## - LOCAL FIELDS
a True
925 ## - LOCAL FIELDS
a G
926 ## - LOCAL FIELDS
a 0
927 ## - LOCAL FIELDS
a SH
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Sách, chuyên khảo, tuyển tập
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Shelving location Date acquired Cost, normal purchase price Total checkouts Full call number Barcode Date last seen Price effective from Koha item type
Sẵn sàng lưu thông       Phòng DVTT Tổng hợp Phòng DVTT Tổng hợp Kho tham khảo 14/04/2022 0.00 1 621.38153 MAT 2016 00041002746 01/07/2024 01/07/2024 Sách, chuyên khảo, tuyển tập